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Text Registration
Copyright Title
Theoretical and experimental study of line edge roughness in nanolithography
Status
Published
on 15 Jun 2007
Year of Creation
2006
Copyright Claimant
Yuansheng Ma
Registration Number
TX0006469367
on 15 Jun 2007Copyright Summary
The U.S. Copyright record (Registration Number: TX0006469367) dated 15 Jun 2007, pertains to an electronic file (eService) titled "Theoretical and experimental study of line edge roughness in nanolithography" created in 2006. The copyright holder is Yuansheng Ma, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Yuansheng Ma.
Application Details
Registration Number
TX0006469367
Registration Date
6/15/2007
Year of Creation
2006
Agency Marc Code
DLC-CO
Record Status
Changed
Physical Description
Computer text data
Notes
Rights Note: Rights and permissions info. on CORDS appl. in CO
Local Copyright Note: Electronic registration
Statements
Author Statement: entire text: Yuansheng Ma
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