Energy dissipation in MEMS-based flexural-mode lateral resonators made from single crystalline and polycrystalline 3C-silicon carbide films

Text Registration

Energy dissipation in MEMS-based flexural-mode lateral resonators made from single crystalline and polycrystalline 3C-silicon carbide films

Status

Published

on 24 Jun 2007

Year of Creation

2006

Wen-Teng Chang

Registration Number

TX0006528250

on 24 Jun 2007

The U.S. Copyright record (Registration Number: TX0006528250) dated 24 Jun 2007, pertains to an electronic file (eService) titled "Energy dissipation in MEMS-based flexural-mode lateral resonators made from single crystalline and polycrystalline 3C-silicon carbide films" created in 2006. The copyright holder is Wen-Teng Chang, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Wen-Teng Chang.

Wen-Teng Chang

Application Details

Registration Number

TX0006528250

Registration Date

6/24/2007

Year of Creation

2006

Agency Marc Code

DLC-CO

Record Status

Changed

Physical Description

Computer text data

Personal Authors

Wen-Teng Chang

Notes

Rights Note: Rights and permissions info. on CORDS appl. in CO

Local Copyright Note: Electronic registration

Statements

Author Statement: entire text: Wen-Teng Chang

Notes

Rights Note: Rights and permissions info. on CORDS appl. in CO

Local Copyright Note: Electronic registration

Statements

Author Statement: entire text: Wen-Teng Chang

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