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A dopant diffusion and CVD reactor design for VLSI circuit fabrication
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Copyright Title

A dopant diffusion and CVD reactor design for VLSI circuit fabrication

Status

Published

on 14 Jun 2007
Year of Creation
1995
Copyright Claimant
Sudipto Ranendra Roy
Registration Number
TX0004210147
on 14 Jun 2007

Copyright Summary


The U.S. Copyright record (Registration Number: TX0004210147) dated 14 Jun 2007, pertains to an electronic file (eService) titled "A dopant diffusion and CVD reactor design for VLSI circuit fabrication" created in 1995. The copyright holder is Sudipto Ranendra Roy, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Sudipto Ranendra Roy.

Copyright Details


Copyright Claimant
Sudipto Ranendra Roy

Application Details


Registration Number
TX0004210147
Registration Date
6/14/2007
Year of Creation
1995
Agency Marc Code
DLC-CO
Record Status
New
Physical Description
Microfiche

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