Proceedings of SPIE- International Conference on Extreme Ultraviolet Lithography 2018 [Published: 2018-11-23. Issue: vol. 10809, 17-20 September 2018]

Serial Registration

Proceedings of SPIE- International Conference on Extreme Ultraviolet Lithography 2018 [Published: 2018-11-23. Issue: vol. 10809, 17-20 September 2018]

Status

Published

on 18 Dec 2018

Year of Creation

2018

SPIE

Registration Number

TX0008687826

on 18 Dec 2018

The U.S. Copyright record (Registration Number: TX0008687826) dated 18 Dec 2018, pertains to an electronic file (eService) titled "Proceedings of SPIE- International Conference on Extreme Ultraviolet Lithography 2018 [Published: 2018-11-23. Issue: vol. 10809, 17-20 September 2018]" created in 2018. The copyright holder is SPIE, known for their creative contributions in serial registration. For any inquiries concerning this copyrighted material, kindly reach out to SPIE.

SPIE

Application Details

Registration Number

TX0008687826

Registration Date

12/18/2018

Year of Creation

2018

Agency Marc Code

DLC-CO

Record Status

New

Corporate Author

SPIE

First Publication Nation

United States

ISSN

0277-786X

Corporate Authors

SPIE

Notes

Rights Note: SPIE, PO Box 10, Bellingham, WA, 98227-0010, United States

Copyright Local Holdings: vol. 10809, 17-20 September 2018 Created 2018 Pub. 2018-11-23 Reg. 2018-12-27 TX0008687826 GCAB

Statements

Application Title Statement: Proceedings of SPIE- International Conference on Extreme Ultraviolet Lithography 2018

Author Statement: SPIE employer for hire Domicile: United States Citizenship: United States Authorship: Collective Work Authorship and Component Work(s) authored or fully owned by the Collective Work Author

Notes

Rights Note: SPIE, PO Box 10, Bellingham, WA, 98227-0010, United States

Copyright Local Holdings: vol. 10809, 17-20 September 2018 Created 2018 Pub. 2018-11-23 Reg. 2018-12-27 TX0008687826 GCAB

Statements

Application Title Statement: Proceedings of SPIE- International Conference on Extreme Ultraviolet Lithography 2018

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