Journal of Micro/Nanolithography, MEMS, and MOEMS [Published: 2018-03-31. Issue: vol. 17, no. 1, 03/31/2018]

Serial Registration

Journal of Micro/Nanolithography, MEMS, and MOEMS [Published: 2018-03-31. Issue: vol. 17, no. 1, 03/31/2018]

Status

Published

on 25 May 2018

Year of Creation

2018

SPIE

Registration Number

TX0008617657

on 25 May 2018

The U.S. Copyright record (Registration Number: TX0008617657) dated 25 May 2018, pertains to an electronic file (eService) titled "Journal of Micro/Nanolithography, MEMS, and MOEMS [Published: 2018-03-31. Issue: vol. 17, no. 1, 03/31/2018]" created in 2018. The copyright holder is SPIE, known for their creative contributions in serial registration. For any inquiries concerning this copyrighted material, kindly reach out to SPIE.

SPIE

Application Details

Registration Number

TX0008617657

Registration Date

5/25/2018

Year of Creation

2018

Agency Marc Code

DLC-CO

Record Status

New

Corporate Author

SPIE

First Publication Nation

United States

ISSN

1932-5150

Preexisting Material

Previously Published Materials

Corporate Authors

SPIE

Notes

Rights Note: SPIE, PO Box 10, Bellingham, WA, 98227-0010, United States

Material Matter Claimed Note: compilation

Statements

Application Title Statement: Journal of Micro/Nanolithography, MEMS, and MOEMS

Author Statement: SPIE employer for hire Domicile: United States Citizenship: United States Authorship: Collective Work Authorship and Component Work(s) authored or fully owned by the Collective Work Author

Notes

Rights Note: SPIE, PO Box 10, Bellingham, WA, 98227-0010, United States

Material Matter Claimed Note: compilation

Statements

Application Title Statement: Journal of Micro/Nanolithography, MEMS, and MOEMS

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