Metrology, Inspection, and Process Control for Microlithography XXVIII [Published: 2014-05-05. Issue: vol. 9050, no. 1 & 2, 24-27 February 2014]

Serial Registration

Metrology, Inspection, and Process Control for Microlithography XXVIII [Published: 2014-05-05. Issue: vol. 9050, no. 1 & 2, 24-27 February 2014]

Status

Published

on 19 Jun 2014

Year of Creation

2014

SPIE

Registration Number

TX0007886785

on 19 Jun 2014

The U.S. Copyright record (Registration Number: TX0007886785) dated 19 Jun 2014, pertains to an electronic file (eService) titled "Metrology, Inspection, and Process Control for Microlithography XXVIII [Published: 2014-05-05. Issue: vol. 9050, no. 1 & 2, 24-27 February 2014]" created in 2014. The copyright holder is SPIE, known for their creative contributions in serial registration. For any inquiries concerning this copyrighted material, kindly reach out to SPIE.

SPIE

Application Details

Registration Number

TX0007886785

Registration Date

6/19/2014

Year of Creation

2014

Agency Marc Code

DLC-CO

Record Status

New

Corporate Author

SPIE

First Publication Nation

United States

ISBN

9780819499738

Corporate Authors

SPIE

Notes

Rights Note: SPIE, PO Box 10, Bellingham, WA, 98227-0010, United States, (360) 676-3290

Copyright Local Holdings: vol. 9050, no. 1 & 2, 24-27 February 2014 ISBN 9780819499738 Created 2014 Pub. 2014-05-05 Reg. 2014-07-08 TX0007886785 KFOM

Statements

Application Title Statement: Metrology, Inspection, and Process Control for Microlithography XXVIII

Author Statement: SPIE employer for hire Domicile: United States Citizenship: United States Authorship: contribution(s) to a collective work

Notes

Rights Note: SPIE, PO Box 10, Bellingham, WA, 98227-0010, United States, (360) 676-3290

Copyright Local Holdings: vol. 9050, no. 1 & 2, 24-27 February 2014 ISBN 9780819499738 Created 2014 Pub. 2014-05-05 Reg. 2014-07-08 TX0007886785 KFOM

Statements

Application Title Statement: Metrology, Inspection, and Process Control for Microlithography XXVIII

Author Statement: SPIE employer for hire Domicile: United States Citizenship: United States Authorship: contribution(s) to a collective work

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