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Rapid isothermal processing 12-13 October 1989, Santa Clara, California Rajendra Singh, chair/editor ; sponsored by SPIE--the international society for optical engineering, cooperating organizations, Center for Advanced Electronic Materials Processing, North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing, University of Wisconsin-Madison, SEMATECH
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Rapid isothermal processing 12-13 October 1989, Santa Clara, California Rajendra Singh, chair/editor ; sponsored by SPIE--the international society for optical engineering, cooperating organizations, Center for Advanced Electronic Materials Processing, North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing, University of Wisconsin-Madison, SEMATECH

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Published

on 14 Jun 2007
Year of Creation
1990
Registration Number
TX0002890873
on 14 Jun 2007

Copyright Summary


The U.S. Copyright record (Registration Number: TX0002890873) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Rapid isothermal processing 12-13 October 1989, Santa Clara, California Rajendra Singh, chair/editor ; sponsored by SPIE--the international society for optical engineering, cooperating organizations, Center for Advanced Electronic Materials Processing, North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing, University of Wisconsin-Madison, SEMATECH" created in 1990. The copyright holder is Society of Photo-Optical Instrumentation Engineers, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Society of Photo-Optical Instrumentation Engineers.

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Registration Number
TX0002890873
Registration Date
6/14/2007
Year of Creation
1990
Agency Marc Code
DLC-CO
Record Status
New
Corporate Author
Society of Photo-Optical Instrumentation Engineers North Carolina State University, Raleigh. Center for Advanced Electronic Materials Processing University of Wisconsin-Madison. Engineering Research Center for Plasma-Aided Manufacturing
Series Statement
SPIE proceedings series v. 1189

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Author Statement: Society of Photo-Optical Instrumentation Engineers, employer for hire
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