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Visit USCOMultichamber and in-situ processing of electronic materials 10-11 October 1989, Santa Clara, California Robert S. Freund, chair/editor ; sponsored by SPIE--the international society for optical engineering, cooperating organizations, Center for Advanced Electronic Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison ... [et. al.]
Text Registration
Copyright Title
Multichamber and in-situ processing of electronic materials 10-11 October 1989, Santa Clara, California Robert S. Freund, chair/editor ; sponsored by SPIE--the international society for optical engineering, cooperating organizations, Center for Advanced Electronic Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison ... [et. al.]
Status
Published
on 14 Jun 2007
Year of Creation
1990
Copyright Claimant
Society of Photo-Optical Instrumentation Engineers
Registration Number
TX0002910806
on 14 Jun 2007Copyright Summary
The U.S. Copyright record (Registration Number: TX0002910806) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Multichamber and in-situ processing of electronic materials 10-11 October 1989, Santa Clara, California Robert S. Freund, chair/editor ; sponsored by SPIE--the international society for optical engineering, cooperating organizations, Center for Advanced Electronic Materials Processing/North Carolina State University, Engineering Research Center for Plasma-Aided Manufacturing/University of Wisconsin-Madison ... [et. al.]" created in 1990. The copyright holder is Society of Photo-Optical Instrumentation Engineers, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Society of Photo-Optical Instrumentation Engineers.
Application Details
Registration Number
TX0002910806
Registration Date
6/14/2007
Year of Creation
1990
Agency Marc Code
DLC-CO
Record Status
New
Corporate Author
Society of Photo-Optical Instrumentation Engineers University of Wisconsin, Madison. Engineering Research Center for Plasma-Aided Manufacturing North Carolina State University, Raleigh. Center for Advanced Electronic Materials Processing
Series Statement
SPIE proceedings series v. 1188
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