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Visit USCOIntegrated circuit metrology, inspection, and process control, IV 5-6 March 1990, San Jose, California William H. Arnold, chair/editor ; sponsored by SPIE--the international society for optical engineering
Text Registration
Copyright Title
Integrated circuit metrology, inspection, and process control, IV 5-6 March 1990, San Jose, California William H. Arnold, chair/editor ; sponsored by SPIE--the international society for optical engineering
Status
Published
on 14 Jun 2007
Year of Creation
1990
Copyright Claimant
Society of Photo-Optical Instrumentation Engineers
Registration Number
TX0002891299
on 14 Jun 2007Copyright Summary
The U.S. Copyright record (Registration Number: TX0002891299) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Integrated circuit metrology, inspection, and process control, IV 5-6 March 1990, San Jose, California William H. Arnold, chair/editor ; sponsored by SPIE--the international society for optical engineering" created in 1990. The copyright holder is Society of Photo-Optical Instrumentation Engineers, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Society of Photo-Optical Instrumentation Engineers.
Application Details
Registration Number
TX0002891299
Registration Date
6/14/2007
Year of Creation
1990
Agency Marc Code
DLC-CO
Record Status
New
Corporate Author
Society of Photo-Optical Instrumentation Engineers
Series Statement
SPIE proceedings series v. 1261
Statements
Author Statement: Society of Photo-Optical Instrumentation Engineers, employer for hire
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