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Visit USCOSelected papers on resolution enhancement techniques in optical lithography editor, F. M. Schellenberg
Text Registration
Copyright Title
Selected papers on resolution enhancement techniques in optical lithography editor, F. M. Schellenberg
Status
Published
on 15 Jun 2007
Year of Creation
2004
Copyright Claimant
Society of Photo-Optical Instrumentation Engineers (employer for hire
Registration Number
TX0006003958
on 15 Jun 2007Copyright Summary
The U.S. Copyright record (Registration Number: TX0006003958) dated 15 Jun 2007, pertains to an electronic file (eService) titled "Selected papers on resolution enhancement techniques in optical lithography editor, F. M. Schellenberg" created in 2004. The copyright holder is Society of Photo-Optical Instrumentation Engineers (employer for hire, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Society of Photo-Optical Instrumentation Engineers (employer for hire.
Copyright Details
Copyright Claimant
Society of Photo-Optical Instrumentation Engineers (employer for hire
Application Details
Registration Number
TX0006003958
Registration Date
6/15/2007
Year of Creation
2004
Place of First Publication
Bellingham, WA
Publisher Name
SPIE Press
Agency Marc Code
DLC-CO
Record Status
New
Corporate Author
Society of Photo-Optical Instrumentation Engineers
Physical Description
875 p
Series Statement
SPIE milestone series vol. MS 178. Brian J. Thompson, series editor
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