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Visit USCOAdvanced microlithography technologies 8-10 November 2004, Beijing, China Yangyuan Wang, Jun-en Yao, Christopher J. Progler, chairs/editors
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Copyright Title
Advanced microlithography technologies 8-10 November 2004, Beijing, China Yangyuan Wang, Jun-en Yao, Christopher J. Progler, chairs/editors
Status
Published
on 15 Jun 2007
Year of Creation
2004
Copyright Claimant
Society of Photo Optical Instrumentation Engineers (employer for hire)
Registration Number
TX0006152925
on 15 Jun 2007Copyright Summary
The U.S. Copyright record (Registration Number: TX0006152925) dated 15 Jun 2007, pertains to an electronic file (eService) titled "Advanced microlithography technologies 8-10 November 2004, Beijing, China Yangyuan Wang, Jun-en Yao, Christopher J. Progler, chairs/editors" created in 2004. The copyright holder is Society of Photo Optical Instrumentation Engineers (employer for hire), known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Society of Photo Optical Instrumentation Engineers (employer for hire).
Copyright Details
Copyright Claimant
Society of Photo Optical Instrumentation Engineers (employer for hire)
Application Details
Registration Number
TX0006152925
Registration Date
6/15/2007
Year of Creation
2004
Place of First Publication
Bellingham, WA
Publisher Name
SPIE
Agency Marc Code
DLC-CO
Record Status
New
Corporate Author
Society of Photo Optical Instrumentation Engineers
Physical Description
380 p
Series Statement
SPIE proceedings series vol. 5645
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