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Microsystems engineering--metrology and inspection 20-21 June 2001, Munich, Germany Christophe Gorecki, Werner P. O. Juptner, Malgorzata Kujawinska, chairs/editors
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Microsystems engineering--metrology and inspection 20-21 June 2001, Munich, Germany Christophe Gorecki, Werner P. O. Juptner, Malgorzata Kujawinska, chairs/editors

Status

Published

on 14 Jun 2007
Year of Creation
2001
Registration Number
TX0005456257
on 14 Jun 2007

Copyright Summary


The U.S. Copyright record (Registration Number: TX0005456257) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Microsystems engineering--metrology and inspection 20-21 June 2001, Munich, Germany Christophe Gorecki, Werner P. O. Juptner, Malgorzata Kujawinska, chairs/editors" created in 2001. The copyright holder is Society of Photo-Optical Instrumentation Engineers (employer for hire), known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Society of Photo-Optical Instrumentation Engineers (employer for hire).

Application Details


Registration Number
TX0005456257
Registration Date
6/14/2007
Year of Creation
2001
Place of First Publication
Bellingham, WA
Publisher Name
SPIE
Agency Marc Code
DLC-CO
Record Status
New
Corporate Author
Society of Photo-Optical Instrumentation Engineers
Physical Description
176 p
Series Statement
SPIE proceedings series vol. 4400
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