Texture and microstructure of iPVD copper manganese seed in 1 �m & 70 nm wide damascene trenches

Text Registration

Texture and microstructure of iPVD copper manganese seed in 1 �m & 70 nm wide damascene trenches

Status

Published

on 30 Jan 2017

Year of Creation

2016

Robert S. Brown

Registration Number

TX0008438675

on 30 Jan 2017

The U.S. Copyright record (Registration Number: TX0008438675) dated 30 Jan 2017, pertains to an electronic file (eService) titled "Texture and microstructure of iPVD copper manganese seed in 1 �m & 70 nm wide damascene trenches" created in 2016. The copyright holder is Robert S. Brown, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Robert S. Brown.

Robert S. Brown

Application Details

Registration Number

TX0008438675

Registration Date

1/30/2017

Year of Creation

2016

Agency Marc Code

DLC-CO

Record Status

New

Physical Description

Electronic file (eService)

First Publication Nation

United States

Personal Authors

Robert S Brown

Notes

Rights Note: Diana G Zajic, ProQuest-CSA, LLC, 789 E. Eisenhower Parkway, Ann Arbor, MI, 48108-3218, United States, (800) 521-0600 xext77020, disspub@proquest.com

Statements

Application Title Statement: Texture and microstructure of iPVD copper manganese seed in 1 �m & 70 nm wide damascene trenches

Author Statement: Robert S. Brown Citizenship: United States Authorship: text

Notes

Rights Note: Diana G Zajic, ProQuest-CSA, LLC, 789 E. Eisenhower Parkway, Ann Arbor, MI, 48108-3218, United States, (800) 521-0600 xext77020, disspub@proquest.com

Statements

Application Title Statement: Texture and microstructure of iPVD copper manganese seed in 1 �m & 70 nm wide damascene trenches

Author Statement: Robert S. Brown Citizenship: United States Authorship: text

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