2007

An integrated CMOS polysilicon coil-based micro-pirani gauge By Nicholas R. Swart & Arokia Nathan

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Recorded Documents

An integrated CMOS polysilicon coil-based micro-pirani gauge By Nicholas R. Swart & Arokia Nathan

Nathan, Arokia

Registration Number

V3245P189

on 11 Jun 2007

The U.S. Copyright record (Recordation Number: V3245P189) dated 11 Jun 2007, pertains to an electronic file (eService) titled "An integrated CMOS polysilicon coil-based micro-pirani gauge By Nicholas R. Swart & Arokia Nathan" created in 0. The copyright holder is Nathan, Arokia, known for their creative contributions in recorded documents. For any inquiries concerning this copyrighted material, kindly reach out to Nathan, Arokia.

Nathan, Arokia

Application Details

Registration Number

V3245P189

Registration Date

6/11/2007

Agency Marc Code

DLC-CO

Record Status

New

Corporate Authors

Canada) University of Waterloo (Ontario

Notes

Bibliographic Note: Transfer of mask work

Notes

Bibliographic Note: Transfer of mask work

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