Selective Atomic Layer Deposition of Transition Metal Thin Films

Status

Published

on 24 Oct 2017

Year of Creation

2017

Marissa Marie Kerrigan

Registration Number

TX0008526297

on 24 Oct 2017

The U.S. Copyright record (Registration Number: TX0008526297) dated 24 Oct 2017, pertains to an electronic file (eService) titled "Selective Atomic Layer Deposition of Transition Metal Thin Films" created in 2017. The copyright holder is Marissa Marie Kerrigan, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Marissa Marie Kerrigan.

Marissa Marie Kerrigan

Application Details

Registration Number

TX0008526297

Registration Date

10/24/2017

Year of Creation

2017

Agency Marc Code

DLC-CO

Record Status

New

Physical Description

Electronic file (eService)

First Publication Nation

United States

Personal Authors

Marissa Marie Kerrigan

Notes

Rights Note: Mark Dill, ProQuest-CSA, LLC, 789 E. Eisenhower Parkway, Ann Arbor, MI, 48108-3218, United States, (800) 521-0600, disspub@proquest.com

Statements

Application Title Statement: Selective Atomic Layer Deposition of Transition Metal Thin Films

Author Statement: Marissa Marie Kerrigan Citizenship: United States Authorship: text

Notes

Rights Note: Mark Dill, ProQuest-CSA, LLC, 789 E. Eisenhower Parkway, Ann Arbor, MI, 48108-3218, United States, (800) 521-0600, disspub@proquest.com

Statements

Application Title Statement: Selective Atomic Layer Deposition of Transition Metal Thin Films

Author Statement: Marissa Marie Kerrigan Citizenship: United States Authorship: text

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