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Ion-surface interactions and limits to silicon epitaxy at low temperatures
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Copyright Title

Ion-surface interactions and limits to silicon epitaxy at low temperatures

Status

Published

on 14 Jun 2007
Year of Creation
1994
Copyright Claimant
M. V. Ramana Murty, 1967
Registration Number
TX0004088821
on 14 Jun 2007

Copyright Summary


The U.S. Copyright record (Registration Number: TX0004088821) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Ion-surface interactions and limits to silicon epitaxy at low temperatures" created in 1994. The copyright holder is M. V. Ramana Murty, 1967, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to M. V. Ramana Murty, 1967.

Copyright Details


Copyright Claimant
M. V. Ramana Murty, 1967

Application Details


Registration Number
TX0004088821
Registration Date
6/14/2007
Year of Creation
1994
Agency Marc Code
DLC-CO
Record Status
New
Physical Description
Microfiche

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