Interaction of intense laser pulses with droplet and cluster sources application to extreme ultraviolet lithography and plasma waveguide generation

Text Registration

Interaction of intense laser pulses with droplet and cluster sources application to extreme ultraviolet lithography and plasma waveguide generation

Status

Published

on 15 Jun 2007

Year of Creation

2006

Hua Sheng

Registration Number

TX0006391107

on 15 Jun 2007

The U.S. Copyright record (Registration Number: TX0006391107) dated 15 Jun 2007, pertains to an electronic file (eService) titled "Interaction of intense laser pulses with droplet and cluster sources application to extreme ultraviolet lithography and plasma waveguide generation" created in 2006. The copyright holder is Hua Sheng, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Hua Sheng.

Hua Sheng

Application Details

Registration Number

TX0006391107

Registration Date

6/15/2007

Year of Creation

2006

Agency Marc Code

DLC-CO

Record Status

Changed

Physical Description

Computer text data

Personal Authors

Hua Sheng

Notes

Rights Note: Rights and permissions info. on CORDS appl. in CO

Local Copyright Note: Electronic registration

Statements

Author Statement: entire text: Hua Sheng

Notes

Rights Note: Rights and permissions info. on CORDS appl. in CO

Local Copyright Note: Electronic registration

Statements

Author Statement: entire text: Hua Sheng

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