Cleaning technology in semiconductor device manufacturing 7 : Proceedings of the Seventh international symposium editors, J. Ruzyllo, T. Hattori, R. L. Opila, R. E. Novak

Text Registration

Cleaning technology in semiconductor device manufacturing 7 : Proceedings of the Seventh international symposium editors, J. Ruzyllo, T. Hattori, R. L. Opila, R. E. Novak

Status

Published

on 15 Jun 2007

Year of Creation

2002

Electrochemical Society, Inc. (employer for hire)

Registration Number

TX0005974696

on 15 Jun 2007

The U.S. Copyright record (Registration Number: TX0005974696) dated 15 Jun 2007, pertains to an electronic file (eService) titled "Cleaning technology in semiconductor device manufacturing 7 : Proceedings of the Seventh international symposium editors, J. Ruzyllo, T. Hattori, R. L. Opila, R. E. Novak" created in 2002. The copyright holder is Electrochemical Society, Inc. (employer for hire), known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Electrochemical Society, Inc. (employer for hire).

Electrochemical Society, Inc. (employer for hire)

Application Details

Registration Number

TX0005974696

Registration Date

6/15/2007

Year of Creation

2002

Place of First Publication

Pennington, NJ

Publisher Name

Electrochemical Society

Agency Marc Code

DLC-CO

Record Status

New

Corporate Author

Electrochemical Society, Inc

Physical Description

374 p

Series Statement

Proceedings vol. 2001-26

Personal Authors

Corporate Authors

Inc Electrochemical Society

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