Proceedings of the fifth international symposium on process physics and modeling in semiconductor technology editors, C. S. Murthy, G. R. Srinivasan, S. T. Dunham

Text Registration

Proceedings of the fifth international symposium on process physics and modeling in semiconductor technology editors, C. S. Murthy, G. R. Srinivasan, S. T. Dunham

Status

Published

on 14 Jun 2007

Year of Creation

1999

Electrochemical Society, Inc. (employer for hire)

Registration Number

TX0004173776

on 14 Jun 2007

The U.S. Copyright record (Registration Number: TX0004173776) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Proceedings of the fifth international symposium on process physics and modeling in semiconductor technology editors, C. S. Murthy, G. R. Srinivasan, S. T. Dunham" created in 1999. The copyright holder is Electrochemical Society, Inc. (employer for hire), known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Electrochemical Society, Inc. (employer for hire).

Electrochemical Society, Inc. (employer for hire)

Application Details

Registration Number

TX0004173776

Registration Date

6/14/2007

Year of Creation

1999

Place of First Publication

Pennington, NJ

Publisher Name

Electrochemical Society

Agency Marc Code

DLC-CO

Record Status

New

Corporate Author

Electrochemical Society, Inc

Physical Description

230 p

Series Statement

Electrochemical Society proceedings vol. 99-2

Personal Authors

C. S Murthy

G. R Srinivasan

S. T Dunham

Corporate Authors

Inc Electrochemical Society

Notes

Bibliographic Note: Cover ti.: Process physics and modeling in semiconductor technology

Notes

Bibliographic Note: Cover ti.: Process physics and modeling in semiconductor technology

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