Proceedings of the fifth International symposium on cleaning technology in semiconductor device manufacturing editors, Jerzy Ruzyllo, Richard E. Novak , co-editors, Charlotte M. Appel ... [et al.]

Text Registration

Proceedings of the fifth International symposium on cleaning technology in semiconductor device manufacturing editors, Jerzy Ruzyllo, Richard E. Novak , co-editors, Charlotte M. Appel ... [et al.]

Status

Published

on 14 Jun 2007

Year of Creation

1998

Electrochemical Society, Inc. (employer for hire)

Registration Number

TX0004773106

on 14 Jun 2007

The U.S. Copyright record (Registration Number: TX0004773106) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Proceedings of the fifth International symposium on cleaning technology in semiconductor device manufacturing editors, Jerzy Ruzyllo, Richard E. Novak , co-editors, Charlotte M. Appel ... [et al.]" created in 1998. The copyright holder is Electrochemical Society, Inc. (employer for hire), known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Electrochemical Society, Inc. (employer for hire).

Electrochemical Society, Inc. (employer for hire)

Application Details

Registration Number

TX0004773106

Registration Date

6/14/2007

Year of Creation

1998

Place of First Publication

Pennington, NJ

Publisher Name

Electrochemical Society

Agency Marc Code

DLC-CO

Record Status

New

Corporate Author

Electrochemical Society, Inc

Physical Description

650 p

Series Statement

Proceedings vol. 97-35

Personal Authors

Jerzy Ruzyllo

Richard E Novak

Charlotte M Appel

Corporate Authors

Inc Electrochemical Society

Statements

Application Title Statement: Cleaning technology in semiconductor device manufacturing V

Statements

Application Title Statement: Cleaning technology in semiconductor device manufacturing V

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