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Visit USCOSemiconductor processing a symposium sponsored by A S T M Committee F-1 on Electronics, National Bureau of Standards, Semiconductor Equipment and Materials Institute, and Stanford University I C Laboratory, San Jose, CA, 7-10 Feb. 1984 ; [editor, Dinesh C. Gupta]
Text Registration
Copyright Title
Semiconductor processing a symposium sponsored by A S T M Committee F-1 on Electronics, National Bureau of Standards, Semiconductor Equipment and Materials Institute, and Stanford University I C Laboratory, San Jose, CA, 7-10 Feb. 1984 ; [editor, Dinesh C. Gupta]
Status
Published
on 14 Jun 2007
Year of Creation
1984
Copyright Claimant
American Society for Testing and Materials
Registration Number
TX0001483922
on 14 Jun 2007Copyright Summary
The U.S. Copyright record (Registration Number: TX0001483922) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Semiconductor processing a symposium sponsored by A S T M Committee F-1 on Electronics, National Bureau of Standards, Semiconductor Equipment and Materials Institute, and Stanford University I C Laboratory, San Jose, CA, 7-10 Feb. 1984 ; [editor, Dinesh C. Gupta]" created in 1984. The copyright holder is American Society for Testing and Materials, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to American Society for Testing and Materials.
Application Details
Registration Number
TX0001483922
Registration Date
6/14/2007
Year of Creation
1984
Place of First Publication
Philadelphia
Publisher Name
ASTM
Agency Marc Code
DLC-CO
Record Status
New
Corporate Author
National Bureau of Standards Semiconductor Equipment and Materials Institute Symposium on Semiconductor Processing, 3d, San Jose, Calif., 1984 American Society for Testing and Materials American Society for Testing and Materials. Committee F-1 on Electronics Stanford University. I C Laboratory
Physical Description
671 p
Series Statement
ASTM special technical publications 850
Corporate Authors
Notes
Bibliographic Note: Proceedings of the Third Symposium on Semiconductor Processing
Statements
Author Statement: American Society for Testing and Materials, employer for hire
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