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Visit USCOPVD for microelectronics sputter deposition applied to semiconductor manufacturing Ronald A. Powell, Stephen M. Rossnagel
Text Registration
Copyright Title
PVD for microelectronics sputter deposition applied to semiconductor manufacturing Ronald A. Powell, Stephen M. Rossnagel
Status
Published
on 14 Jun 2007
Year of Creation
1998
Copyright Claimant
Academic Press
Registration Number
TX0004940033
on 14 Jun 2007Copyright Summary
The U.S. Copyright record (Registration Number: TX0004940033) dated 14 Jun 2007, pertains to an electronic file (eService) titled "PVD for microelectronics sputter deposition applied to semiconductor manufacturing Ronald A. Powell, Stephen M. Rossnagel" created in 1998. The copyright holder is Academic Press, known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Academic Press.
Application Details
Registration Number
TX0004940033
Registration Date
6/14/2007
Year of Creation
1998
Place of First Publication
San Diego
Publisher Name
Academic Press
Agency Marc Code
DLC-CO
Record Status
New
Physical Description
419 p
Series Statement
Thin films vol. 26
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