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Modeling of film deposition for microelectronic applications edited by Stephen Rossnagel
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Text Registration
Copyright Title

Modeling of film deposition for microelectronic applications edited by Stephen Rossnagel

Status

Published

on 14 Jun 2007
Year of Creation
1996
Registration Number
TX0004421938
on 14 Jun 2007

Copyright Summary


The U.S. Copyright record (Registration Number: TX0004421938) dated 14 Jun 2007, pertains to an electronic file (eService) titled "Modeling of film deposition for microelectronic applications edited by Stephen Rossnagel" created in 1996. The copyright holder is Academic Press, Inc. (employer for hire), known for their creative contributions in text registration. For any inquiries concerning this copyrighted material, kindly reach out to Academic Press, Inc. (employer for hire).

Copyright Details


Application Details


Registration Number
TX0004421938
Registration Date
6/14/2007
Year of Creation
1996
Place of First Publication
San Diego
Publisher Name
Academic Press
Agency Marc Code
DLC-CO
Record Status
New
Corporate Author
Academic Press, Inc
Physical Description
291 p
Series Statement
Thin films vol. 22

Personal Authors


Corporate Authors


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